Fraunhofer IPMS

Brief Profile

The Fraunhofer IPMS with its 300 employees is dedi­cated to applied research and development at the highest international level in the fields of photonic microsystems, microsystems technologies, nano­electronic technologies and wireless microsystems. Innovative processes and products which are based upon our various technologies can be found in all large markets – such as information and communica­tion technologies, consumer products, automobile technology, semi-conductor technology, measure­ment and medical technology. More than 50 percent of our annual operating expense of 35 million euros is financed by direct commissions from industry.

Regarding micromechanical and photonic microsys­tems we offer complete solutions: From conception to component right up to complete systems. This includes sample and pilot production in our 1500 m² (15,000 ft²) clean room (ISO 14644-1 class 4) with qualified processes. In order to meet the challenging demands of our customers, our institute is certified according to the standard DIN EN 9001:2008 for research, development and fabrication including semiconductor and microsystem processes as well as integrated actuators and sensor technologies.

Additionally, our business unit Center Nanoelectronic Technologies CNT provides services in the field of nano and microelectronics with functional electronic materials, processes and systems, device and integra­tion, maskless lithography and analytics. Another 800 m² of clean room space (ISO 14644-1 class 6) is available for this purpose, along with analysis and metrology processes with atomic resolution and high sensitivity.

Research Highlights


Spatial Light Modulators

The spatial light modulators developed at Fraunhofer IPMS consist of arrays of micromirrors on semiconductor chips, whereby the number of mirrors varies depending on the application, from a few hundred to several millions.


MEMS Scanners

To date, more than 50 different resonant scanners have been designed and manufactured. They are made to deflect light either one-dimensionally or two-dimensionally or for high-speed optical path length modulation.


Wireless Microsystems

The business unit “Wireless Microsystems” provides product-related partial and complete solutions for customer- and application-specific problems of hard- and software. This includes optical wire­less communication (Li-Fi), maintenance-free and battery-free RFID sensor nodes, integrated intercon­nected systems, track and trace as well as big data and data analysis.


Environmental Sensing

The “Environmental Sensing” (ENV) business unit focuses on the development of sensory de­vices, components and subsystems to be used in application-specific devices for the detection and evaluation of environmental conditions.


Center Nanoelectronic Technologies CNT

At the Center Nanoelectronic Technologies (CNT), Fraunhofer IPMS carries out applied research on 300 mm wafers for IC manufacturers, suppliers, equipment manufacturers and R&D partners.


Mesoscopic Actuators and Systems

Hardly any fast-growing technical industry can exist without components for microsystems technology in terms of sensors and actuators. In order to meet the growing demands on the performance of micromechanical components and expand the technical base for new applications, further miniaturization is essential